PUBLICATIONS

A CMOS-MEMS filter using a V-coupler and electrical phase inversion

Sin categoría23 agosto, 2010

In this paper a fully integrated CMOS-MEMS filter is presented. The filter is formed by two beams using a V-shaped coupler which allows the in-plane vibrations. The device presents a BW of 1.85 MHz for a 29 MHz center frequency. The electrical phase inversion mechanism is used in order to obtain the filter response. The…

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Linear operation of a 11MHz CMOS-MEMS resonator

Sin categoría23 agosto, 2010

In this work, the characterization of the first lateral in-plane flexural mode DETF (Double Ended Tuning Fork) MEMS resonator integrated monolithically in a CMOS 0.35μm technology is done. This characterization is done with the same resonator stand-alone and with an integrated CMOS amplifier to obtain the handling dynamic range of the applied voltage (dc bias…

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Characterization of CMOS-MEMS resonator by pulsed mode electrostatic actuation

Sin categoría23 agosto, 2010

Experimental results of a pulsed mode electrostatic excitation on a Double Ended Tunning Fork (DETF) MEMS resonator at 11 MHz fabricated on a commercial standard 0.35um CMOS technology are described. Using small pulse widths of 4 ns, a ten percent power safe and a reduction of the MEMS non-linearities are achieved. DOI Article published in…

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