Experimental results of a pulsed mode electrostatic excitation on a Double Ended Tunning Fork (DETF) MEMS resonator at 11 MHz fabricated on a commercial standard 0.35um CMOS technology are described. Using small pulse widths of 4 ns, a ten percent power safe and a reduction of the MEMS non-linearities are achieved.
Article published in 2010 IEEE International Frequency Control Symposium
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