In this paper a fully integrated CMOS-MEMS filter is presented. The filter is formed by two beams using a V-shaped coupler which allows the in-plane vibrations. The device presents a BW of 1.85 MHz for a 29 MHz center frequency. The electrical phase inversion mechanism is used in order to obtain the filter response. The device is fabricated using the capacitance module present in the commercial CMOS technology from Austria Micro-systems 0.35 μm.
Conference Paper published in 2010 IEEE International Frequency Control Symposium
Copyright © 2010, IEEE
